Introduction:
A surface profiler is a metrology instrument for topographical characterization of a sample’s uppermost layers. Our profiler provides repeatable, accurate measurements on varied surfaces, from traditional 2D roughness surface characterization and step height measurements to advanced 3D mapping.
Specifications:
- Max. wafer size: Up to 4"
- Max. sample thickness: 50mm
- Measurement: Line scan and mapping
- Stylus: Diamond tip
- Stylus radius: 2µm
- Stylus force: 1 – 15mg
- Data points per scan: 120,000 max.
- Vertical resolution: 1Å (@ 6.55 µm range)
Notes to user:
Supplier information:
https://www.bruker.com/products/surface-and-dimensional-analysis/stylus-profilometers.html
Please click here to download the equipment introduction poster.
Equipment location:
Room HJ705 (Class 1,000)
