Ultra-precision Mechanical and Plasma Hybrid Polishing Technology and Equipment for Machining Super Hard Materials

Ultra-precision Multi-Axes Hybrid Mechanism Polishing Machine with On-machine Measurement System

To achieve super-finished surfaces with sub-nanometer surface finish and low surface/sub –surface damage of super hard materials, PolyU has built an ultra-precision mechanical polishing equipment based on hybrid mechanism and investigated the associated bonnet polishing process. An on-machine measurement system is developed based on CCD visual technology to improve the efficiency of the polishing process and the form accuracy of the workpiece. After further development, the on-machine measurement system can enable the equipment to carry out polishing process self-optimization.

Special Features and Advantages

A bonnet is used as a polishing tool, which is flexible and able to adapt itself well to the shape of the parts, in order to achieve better form accuracy

The ultra-precision multi-axes hybrid mechanism polishing equipment is built based on hybrid mechanism which possesses higher accuracy and stiffness

An on-machine measurement system for the machine is developed based on CCD visual system

Applications

Fabrication of super-finished freeform surfaces with nanometre surface finish for various types of difficult-to-machine-materials such as optical glass, Silicon Carbide, Silicon, etc

Provision of the capability to polish flat, aspherical, off-axis aspherical and freeform surfaces and complex tool paths can be implemented

Workpiece can be measured by on-machine measurement system and the polishing process can be self-optimized for further development

Principal Investigator

Prof. Benny Chi Fai CHEUNG

Department of Industrial and Systems Engineering

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Ultra-precision Mechanical and Plasma Hybrid Polishing Technology and Equipment for Machining Super Hard Materials

Ultra-precision Multi-Axes Hybrid Mechanism Polishing Machine with On-machine Measurement System