PVA TePla IoN Radical Plasma Cleaner

Introduction:

Plasma cleaner is the removal of impurities and contaminants from surfaces through the use of an energetic plasma created from gaseous species, such as oxygen. The plasma is created by using high frequency voltages (typically kHz to >MHz) to ionise the low pressure gas. It serves as excellent tool for surface cleaning, surface preparation and surface modification. Plasma treatment may be applied to a wide variety of materials, including metals, ceramics, composites, plastics, polymers and biomaterials. 

Specifications:

• Substrate size: Up to 4"
• RF generator: 100kHz, preset to 50 Watts
• Process gas: O₂

Notes to user:

Supplier information:

         http://www.pvateplaamerica.com/

Equipment location:

Room HJ705 (Class 1,000)