Introduction:
The JEOL Model JSM-6490 is a tungsten thermionic emission SEM system suitable for high-vacuum operations. A high spatial resolution with secondary electron and backscatter detector allows the observation with fine surface details. This is a vital feature for comprehensive characterization of material research.
Specifications / Applications:
- Five-axis eccentric stage can accommodate a specimen of up to 4-inch in diameter.
- Imaging up to 100,000X, backscattered electron (BSE) and X-ray analysis of elements down to carbon with energy dispersive X-ray spectroscopy (EDX) detector.
Notes to user:
Any vacuum compatible solids (thin films, powders, fibers, bulk materials) for SEM. For EDX sample, same requirements as SEM but highly polished surface is recommended.
Supplier information:
https://www.jeol.co.jp/products/detail/JSM-6490A_6490LA.html
Equipment location:
Room BC710
