Thermal Evaporation System

Introduction:

Thermal evaporation is a simplest form of of physical vapor deposition. A resistive heat source is used to heat and evaporate source materials to achieve appreciable vapor pressure in a vacuum environment and form a thin film on the substrate.

Specifications / Applications:

• Electrical contacts, metallic contract layers, etc.
• Source materials available: Aluminum, Chromium, Gold
• Single source
• Resistive heating power: 15 A / 2 kW
• Substrate size: 2” diameter
• Rate sensor not available

Notes to user:

User are required to clean all sources / targets / substrate holder and chamber upon each usage.

Equipment location:

Room BC708