Equipment in Class 100 (Mask Aligner, Spin Coater, Hotplate, Microscope and UVO) will be migrated to new URFMS platform, Booking and usage charges will be handled by the new URFMS platform under RIO on and after 2022 Oct 25. Please sign-in and setup account in URFMS (https://urfms.polyu.edu.hk/facilities) to reserve the equipment.
Equipment in Class 100 (yellow room) will be migrated to new URFMS platform
17 Oct 2022
Announcement
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