News

Training Session for Suss MA6 Aligner

Training Session will be held on 7-Dec at 10:30am. Please go to URFMS (https://urfms.polyu.edu.hk/facilities/umf-cleanroom) to enroll.

Equipment Migration to New URFMS System (Phase 2)

Equipment (Denton E-Beam Explorer, Denton Sputtering System, Denton Thermal Evaporator, DektakXT Surface Profiler, Probe Station with Analyzer, Atomic Layer Deposition System, Rapid Thermal Processor and Inductively Coupled Plasma Etcher) will be migrated to new URFMS platform, Booking and usage charges will be handled by the new URFMS platform under RIO on and after 2022 Dec 22. Please sign-in and setup account in URFMS (https://urfms.polyu.edu.hk/facilities) to reserve the equipment.

Training Session for Denton E-Beam Explorer System

Training Session will be held on 29-Nov at 10:30am. Please go to E-Beam Explorer booking page to enroll. (P.S. Gather at Room HJ709. Successful applicants will be notified by email.)

Training Session for Harrick Plasma Cleaner

Training Session will be held on 1-Dec at 10:30am. Please go to Harrick Plasma Cleaner booking page to enroll. (P.S. Gather at Room HJ709 and need to attend whole training session. Successful applicants will be notified by email.)

Training Session for Denton Sputtering System

Training Session will be held on 30-Nov at 10:30am. Please go to Denton Sputtering System booking page to enroll. (P.S. Gather at Room HJ709 and need to attend whole training session. Successful applicants will be notified by email.)

Training Session for Sawatec Spin Coater SM-180-BT easy (For Electron-beam lithography spin coating)

Training Session will be held on 24-Nov at 10:30am. Please come to Room HJ709. (No need for registration, and prepare Chemical Safety Certification if haven't submitted.)

Training Session for Inductively Coupled Plasma Etcher (ICP)

Training Session will be held on 22-Nov at 10:30am. Please go to Inductively Coupled Plasma Etcher booking page to enroll. (P.S. Gather at Room HJ709 and need to attend whole training session. Successful applicants will be notified by email.)

Training Session for Denton E-Beam Explorer System

Training Session will be held on 23-Nov at 10:30am. Please go to E-Beam Explorer booking page to enroll. (P.S. Gather at Room HJ709. Successful applicants will be notified by email.)

Training Session for Atomic Layer Deposition System

Training Session will be held on 17-Nov at 10:30am. Please go to Atomic Layer Deposition System page to enroll. (P.S. Gather at Room HJ709 and need to attend whole training session. Successful applicants will be notified by email.)

Training Session for Suss MA6 Aligner

Training Session will be held on 16-Nov at 10:30am. Please go to URFMS (https://urfms.polyu.edu.hk/facilities/umf-cleanroom) to enroll.