Precision Metrology Equipment and Instrumentation | State Key Laboratory of Ultra-precision Machining Technology

A Class 10,000 cleanroom standard “Ultra-precision Measurement Laboratory” is established in the main laboratory at the PolyU and equipped with precision measuring systems.

Werth

Multi-sensor Coordinate Measuring System
– WerthVideoCheck UA

Alicona

3D Optical Measuring System
– Alicona IFM G4

Zygo_NexView

Optical Profiling System
– New Zygo NexView

Form Talysurf PGI Freeform_2

Measurement System
– Form Talysurf PGI Freeform

SEM_2

Scanning Electron Microscope
– Thermo Scientific Apreo 2 SEM

Form TalySurf S2

Measurement System
– Form TalySurf Series 2

CMP_1

Mechanical Tester
– Bruker TriboLab CMP

Laser Interferometric Non-contact Profiler System
– Zygo

Wyko NT8000

Optical Profiling System
– Wyko NT8000

Besides, the laboratory is also equipped with the following measurement instruments:
• Optikos QC bench MTF Measuring System
• Konica Minolta Chroma-meter – CS-200
• Sindatek Optical Video-based Contact Angle Meter – 100SB
• Hitachi Tabletop Microscope – TM3000
• Parks Systems Atomic Force Microscope – XE 70