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Extreme Micro/Nanomanufacturing and Its Optical Applications

Distinguished Research Seminar Series

20230207Prof Huigao DuanEvent banner
  • Date

    07 Feb 2023

  • Organiser

    Department of Industrial and Systems Engineering, PolyU; Research Institute for Advanced Manufacturing (RIAM)

  • Time

    10:00 - 11:30

  • Venue

    Online via ZOOM  

Speaker

Professor Huigao Duan

Remarks

Meeting link will be sent to successful registrants

20230207Prof Huigao DuanPoster

Summary

Micro/Nanomanufacturing has been playing a key role in the integrated-circuits industry and developing micro/nanosystems. Pushing the micro/nanomanufacturing towards ultrasmall dimension and ultrahigh precision is of great interest and importance for various applications. In this presentation, I will share our efforts in developing new processes to fabricate functional micro/nanostructures with critical dimension down to 10 nm. Novel applications on plasmonics, color printing and metasurfaces will be demonstrated.

Keynote Speaker

Professor Huigao Duan

Professor Huigao Duan

College of Mechanical and Vehicle Engineering, 
Hunan University, China.

Dr Huigao Duan received his B.S. and Ph.D. in Physics from Lanzhou University in 2004 and 2010, respectively. From 2006 to 2008, he was working as a Researcher at the Institute of Electrical Engineering, Chinese Academy of Sciences. From 2008 to 2010, he was a visiting Researcher at the Massachusetts Institute of Technology (MIT), focusing on understanding the resolution limits of electron-beam lithography. He was working in IMRE, A*STAR, Singapore as a Research Scientist from 2010 to 2012, focusing on nanoplasmonics and its applications in solid-state devices. During this period, he was a visiting scientist at the University of Stuttgart, Germany for 3 months. He joined Hunan University, China as a full professor in 2012 and is now a principal investigator in the College of Mechanical and Vehicle Engineering. He has authored or co-authored 240 peer-reviewed journal papers with citations more than 12400 times and an H-index of 60 (Google Scholar). His current research interests include sub-10-nm fabrication, nanophotonics, smart micro/nanosystems and their relevant applications. He has served as editor or associate editor for several distinguished journals such as the International Journal of Extreme Manufacturing, Research (a SCIENCE partner journal), Optics & Precision Engineering, IEEE Transactions on Nanotechnology and Microelectronic Engineering. Now he is the director of the Greater Bay Area Innovation Institute (Guangzhou) of Hunan University and the vice director of the National Engineering Research Center for High Efficiency Grinding.

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