Denton DV502B Thermal Evaporator

Introduction:

Thermal evaporation is a common method of physical vapor deposition (PVD). It is one of the simplest forms of PVD and typically uses a resistive heat source to evaporate a solid material in a vacuum environment to form a thin film. The material is heated in a high vacuum chamber until vapor pressure is produced. The evaporated material traverses the vacuum chamber with thermal energy and coats the substrate.

Specifications:

• Substrate size: Up to 4”
• Substrate rotation: 0 – 20 rpm
• Vacuum: Achieve 10^-6 Torr
• Source: 2 evaporation sources
• Thickness control: Inficon deposition controller
• Substrate type: Wafer, plastic, glass

Notes to user:

User should weight the materials (Au, Pd, Pt) before and after deposition and write down on the log book, otherwise the materials cost will be charged by estimation.

Supplier information:

         https://www.dentonvacuum.com/

Please click here to download the equipment introduction poster.

Equipment location:

Room HJ705 (Class 1,000)