Surface Profiler (Tencor P-10)

Introduction:

Tencor P-10 surface profiler utilize a stylus tip to scan and measure 2D step height on sample surface. An advantage of the stylus measurement technique is it a direct measurement, independent of materials properties. It supports measurement of step height, roughness, RMS, vertical range and low force measurement.

Specifications / Applications:

• 50Å to 130µm Range
• 8” substrates size
• 1 – 50mg stylus force
• Windows 3.1 OS

Notes to user:

Supplier information:

         https://www.kla-tencor.com/products/surface-profilers

Equipment location:

Room BC710