Tescan MIRA Field Emission Scanning Electron Microscope

Major Functions / Key Features

• Imaging resolution down to 1.2 nm
• Fully motorized compucentric five-axis sample stage accommodate specimen up to 4-inch in diameter
• Apertureless optical design powered by In-flight Beam Tracing™
• Unique Wide Field Optics™ design allows imaging magnifications as low as 2× without the need for an additional optical navigation camera
• SingleVac™ mode as a standard feature for observing charging and beam-sensitive samples
• Detectors:
  Everhart-Thormley Secondary Electron (SE)
  Retractable Backscattered Electron (BSE)
  In-beam Secondary Electron (In-beam SE)
  In-beam Backscatter Electron (In-beam BSE)
  • Beam Deceleration Technology (BDT) to enhance imaging performance at lower accelerating voltages
  • Energy Dispersive X-ray (EDX) Spectroscopy for element identification
  • Electron Backscatter Diffraction (EBSD) Analysis
  • Electron Beam Lithography (EBL)